IEEE - Institute of Electrical and Electronics Engineers, Inc. - Highly defined narrow track write heads fabricated by focused ion beam trimming with the Al/sub 2/O/sub 3/ refilling process
Author(s): | T. Ishi ; Y. Nonaka ; T. Matsubara ; N. Ishiwata |
Sponsor(s): | IEEE Magnetics Society |
Publisher: | IEEE - Institute of Electrical and Electronics Engineers, Inc. |
Publication Date: | 1 September 1999 |
Volume: | 35 |
Page Count: | 3 |
Page(s): | 2,541 - 2,543 |
ISSN (Paper): | 0018-9464 |
ISSN (Online): | 1941-0069 |
DOI: | 10.1109/20.800884 |
Regular:
We have developed a focused ion beam trimmed write head using Al/sub 2/O/sub 3/ refilling, in which an Al/sub 2/O/sub 3/ film was deposited and a two-step lapping process was performed after FIB... View More