IEEE - Institute of Electrical and Electronics Engineers, Inc. - Highly defined narrow track write heads fabricated by focused ion beam trimming with the Al/sub 2/O/sub 3/ refilling process

Author(s): T. Ishi ; Y. Nonaka ; T. Matsubara ; N. Ishiwata
Sponsor(s): IEEE Magnetics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 1999
Volume: 35
Page Count: 3
Page(s): 2,541 - 2,543
ISSN (Paper): 0018-9464
ISSN (Online): 1941-0069
DOI: 10.1109/20.800884
Regular:

We have developed a focused ion beam trimmed write head using Al/sub 2/O/sub 3/ refilling, in which an Al/sub 2/O/sub 3/ film was deposited and a two-step lapping process was performed after FIB... View More

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