IEC - International Electrotechnical Commission - IEC 62047-21:2014
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
published
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| Organization: | IEC - International Electrotechnical Commission |
| Publication Date: | 19 June 2014 |
| Status: | published |
| Page Count: | 26 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
abstract:
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechani
Document History
IEC 62047-21:2014
June 19, 2014
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS)...