IEC - International Electrotechnical Commission - IEC/IEEE 62659:2015
Nanomanufacturing - Large scale manufacturing for nanoelectronics
published
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| Organization: | IEC - International Electrotechnical Commission |
| Publication Date: | 30 September 2015 |
| Status: | published |
| Page Count: | 12 |
| ICS Code (Physics. Chemistry): | 07.030 |
| ICS Code (Nanotechnologies): | 07.120 |
| ICS Code (Manufacturing forming processes): | 25.020 |
abstract:
IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of... View More
Document History
IEC/IEEE 62659:2015
September 30, 2015
Nanomanufacturing - Large scale manufacturing for nanoelectronics
IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of...