IEEE - Institute of Electrical and Electronics Engineers, Inc. - Deposition of high-durability protective layers with a composite structure of DLC and GLC by facing-targets sputtering

Author(s): K. Noda ; T. Kawanabe ; M. Naoe
Sponsor(s): IEEE Magnetics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 1998
Volume: 34
Page Count: 3
Page(s): 1,750 - 1,752
ISSN (Paper): 0018-9464
ISSN (Online): 1941-0069
DOI: 10.1109/20.706693
Regular:

An amorphous carbon film is currently used for the protective layer for overcoating the surface of the recording layer of a hard disk. In this study, the film was deposited by faring-targets... View More

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