IEEE - Institute of Electrical and Electronics Engineers, Inc. - Analytical model for the surface field distribution of SOI RESURF devices

Author(s): Sang-Koo Chung ; Seung-Youp Han
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 1998
Volume: 45
Page Count: 3
Page(s): 1,374 - 1,376
ISSN (Paper): 0018-9383
ISSN (Online): 1557-9646
DOI: 10.1109/16.678582
Regular:

An analytical model is presented to determine the electric field distribution along the semiconductor surface of silicon-on-insulator (SOI) REduced SURface Field (RESURF) devices, which... View More

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