IEEE - Institute of Electrical and Electronics Engineers, Inc. - Process simplification in DRAM manufacturing

Author(s): R.P.S. Thakur ; S.J. DeBoer ; E.-X. Ping ; C.A. Jesse
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 1998
Volume: 45
Page Count: 11
Page(s): 609 - 619
ISSN (Paper): 0018-9383
ISSN (Online): 1557-9646
DOI: 10.1109/16.661222
Regular:

DRAM manufacturers are driving the quest for integration friendly, simplified, and statistically-controlled process development. In the DRAM field, strong emphasis must be placed on... View More

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