IEEE - Institute of Electrical and Electronics Engineers, Inc. - Benchmarking semiconductor manufacturing performance using a pairwise-comparison method

Author(s): L. Sattler ; C.R. Glassey ; B.I. Saeed
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 1997
Volume: 10
Page Count: 5
Page(s): 317 - 321
ISSN (Paper): 0894-6507
ISSN (Online): 1558-2345
DOI: 10.1109/66.572087
Regular:

Benchmarking performance against competitors is an increasingly popular activity within the semiconductor industry. Owing to the high variability in manufacturing metrics, a simple monthly metric... View More

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