IEEE - Institute of Electrical and Electronics Engineers, Inc. - SOI and Engineered-SOI, ideal platforms for building MEMS

2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)

Author(s): Fari Assaderaghi
Sponsor(s): IEEE Electron Devices Soc.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2013
Conference Location: Monterey, CA, USA
Conference Date: 7 October 2013
Page(s): 1 - 2
ISBN (Electronic): 978-1-4799-1361-9
DOI: 10.1109/S3S.2013.6716582
Regular:

MEMS (Micro-Electro-Mechanical Systems) have been developed over the past 40 years with ink jet, pressure sensor and accelerometers driving the technology. The last decade has particularly... View More

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