IEEE - Institute of Electrical and Electronics Engineers, Inc. - Sputtered titanium dioxide thin film for Extended-Gate FET sensor application

9th IEEE Regional Symposium on Micro and Nanoelectronics (RSM 2013)

Author(s): M. A. Rosdan ; S. H. Herman ; W. F. H. Abdullah ; N. S. Kamarozaman ; M. I. Syono
Sponsor(s): IEEE Electron Devices Soc.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2013
Conference Location: Langkawi, Malaysia
Conference Date: 25 September 2013
Page(s): 219 - 222
ISBN (CD): 978-1-4799-1181-3
ISBN (Electronic): 978-1-4799-1183-7
DOI: 10.1109/RSM.2013.6706513
Regular:

This paper presents an investigation on sputtered titanium dioxide (TiO2) thin film for application in the Extended-Gate Field Effect Transistor (EGFET) sensor application for pH... View More

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