IEEE - Institute of Electrical and Electronics Engineers, Inc. - A novel of fluidic based one side electrode type pressure sensor

9th IEEE Regional Symposium on Micro and Nanoelectronics (RSM 2013)

Author(s): Mohd Norzaidi Mat Nawi ; Asrulnizam Abd Manaf ; Mohamad Faizal Abd Rahman ; Mohd Rizal Arshad ; Othman Sidek
Sponsor(s): IEEE Electron Devices Soc.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2013
Conference Location: Langkawi, Malaysia
Conference Date: 25 September 2013
Page(s): 37 - 40
ISBN (CD): 978-1-4799-1181-3
ISBN (Electronic): 978-1-4799-1183-7
DOI: 10.1109/RSM.2013.6706467
Regular:

This paper presents the development of the novel fluidic based one side electrode pressure sensor. The structure of the sensor consists of container and an electrode. For the container, the... View More

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