IEEE - Institute of Electrical and Electronics Engineers, Inc. - Finite element analysis on magnetic force generation of electromagnetic microactuator for micropump

9th IEEE Regional Symposium on Micro and Nanoelectronics (RSM 2013)

Author(s): Roer Eka Pawinanto ; Jumril Yunas ; Burhanuddin Yeop Majlis ; Azrul Azlan Hamzah
Sponsor(s): IEEE Electron Devices Soc.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2013
Conference Location: Langkawi, Malaysia
Conference Date: 25 September 2013
Page(s): 25 - 28
ISBN (CD): 978-1-4799-1181-3
ISBN (Electronic): 978-1-4799-1183-7
DOI: 10.1109/RSM.2013.6706464
Regular:

In this work, a theoretical analysis on the magnetic force generation of micro-actuator driven by planar microcoil is reported. The actuator design is optimized to increase the magnetic force and... View More

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