IEEE - Institute of Electrical and Electronics Engineers, Inc. - Methods and properties of quadratic iterative learning control for semi-conductor processes under different perturbations

2013 13th International Conference on Control, Automaton and Systems (ICCAS 2013)

Author(s): Huiyong Kim ; Jun Hyung Park ; Kwang Soon Lee
Sponsor(s): IEEE Ind. Electron. Soc.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2013
Conference Location: Gwangju, South Korea
Conference Date: 20 October 2013
Page(s): 570 - 573
ISBN (CD): 978-89-93215-05-2
ISSN (Paper): 2093-7121
DOI: 10.1109/ICCAS.2013.6703932
Regular:

Semi-conductor manufacturing is composed of a large number of processing steps, but only a very limited number of processing wafers are monitored after few critical steps of manufacturing process,... View More

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