Engineers Australia - Design and control of a MEMS micro-gripper with integrated electro-thermal force sensor

2013 3rd Australian Control Conference (AUCC)

Author(s): Busara Piriyanont ; S. O. Reza Moheimani ; Ali Bazaei
Publisher: Engineers Australia
Publication Date: 1 November 2013
Conference Location: Fremantle, WA, Australia
Conference Date: 4 November 2013
Page(s): 479 - 484
ISBN (CD): 978-1-4799-2497-4
ISBN (Electronic): 978-1-4799-2498-1
DOI: 10.1109/AUCC.2013.6697320
Regular:

This paper presents design and control of a MEMS micro-gripper with integrated electro-thermal force sensor. Due to the small foot-print of the sensor, it leads to a smaller size device, and a... View More

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