European Microwave Association - Characterization of high-Q laterally moving RF MEMS tuneable capacitor

2013 European Microwave Integrated Circuit Conference (EuMIC)

Author(s): U. Shah ; J. Oberhammer
Publisher: European Microwave Association
Publication Date: 1 October 2013
Conference Location: Nuremberg, Germany
Conference Date: 6 October 2013
Page(s): 352 - 355
ISBN (Electronic): 978-2-87487-032-3

This paper investigates an implementation of RF MEMS tuneable capacitors based on the lateral displacement of the sidewalls of a three-dimensional micromachined coplanar transmission line. The... View More