IEEE - Institute of Electrical and Electronics Engineers, Inc. - Robotic in situ stiffness cartography of InP membranes by dynamic force sensing

2013 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2013)

Author(s): Jean-Ochin Abrahamians ; Bruno Sauvet ; Jerome Polesel-Maris ; Remy Braive ; Stephane Regnier
Sponsor(s): IEEE Ind. Electron. Soc.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2013
Conference Location: Tokyo, Japan
Conference Date: 3 November 2013
Page(s): 1,016 - 1,021
ISSN (Paper): 2153-0858
DOI: 10.1109/IROS.2013.6696475
Regular:

Typical methods of measuring mechanical properties at the micro-scale are destructive, and do not allow proper characterisation on resonant MEMS/NEMS. In this paper, a cartography of local... View More

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