West Pomeranian University of Technology Szczecin - Modelling and control of 3D STM-like scanning device with application to surface reconstruction

2013 18th International Conference on Methods & Models in Automation & Robotics (MMAR)

Author(s): Lukasz Ryba ; Alina Voda ; Gildas Besancon
Sponsor(s): IEEE Control Syst. Soc.
Publisher: West Pomeranian University of Technology Szczecin
Publication Date: 1 August 2013
Conference Location: Miedzyzdroje, Poland
Conference Date: 26 August 2013
Page(s): 479 - 484
ISBN (CD): 978-1-4673-5507-0
ISBN (Electronic): 978-1-4673-5508-7
ISBN (Paper): 978-1-4673-5506-3
DOI: 10.1109/MMAR.2013.6669957

This paper presents the modelling of the 3D motion of a piezo-actuated tunneling tip in an STM-like (Scanning Tunneling Microscope) micromechanical system, with the aim of summarizing challenging... View More