IEEE - Institute of Electrical and Electronics Engineers, Inc. - Automated nanoprobing under scanning electron microscopy

2013 IEEE International Conference on Robotics and Automation (ICRA)

Author(s): Zheng Gong ; Brandon K. Chen ; Jun Liu ; Yu Sun
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2013
Conference Location: Karlsruhe, Germany
Conference Date: 6 May 2013
Page(s): 1,433 - 1,438
ISBN (Electronic): 978-1-4673-5643-5
ISBN (Paper): 978-1-4673-5641-1
ISSN (Paper): 1050-4729
DOI: 10.1109/ICRA.2013.6630759
Regular:

Nanomanipulation inside electron microscopes enables a multitude of precision applications. The semiconductor industry employs this capability to probe sub-micrometer-sized features to... View More

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