IEEE - Institute of Electrical and Electronics Engineers, Inc. - A novel hydrogen sensor based on Pt/WO 3 /Si MIS Schottky diode

2013 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC)

Author(s): Y. Liu ; J. Yu ; F. X. Cai ; W. M. Tang ; P. T. Lai
Sponsor(s): IEEE Electron Devices Soc.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2013
Conference Location: Hong Kong, China
Conference Date: 3 June 2013
Page(s): 1 - 2
ISBN (Electronic): 978-1-4673-2523-3
DOI: 10.1109/EDSSC.2013.6628054
Regular:

In this work, we investigate the static and dynamic gas response of Schottky diode based hydrogen sensor employing a Pt/WO3/n-type Si configuration. The role and importance of tungsten... View More

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