IEEE - Institute of Electrical and Electronics Engineers, Inc. - The effect of cleaning procedures on surface charging of various substrates

Author(s): S.L. Burkett ; E.M. Charlson ; E.J. Charlson ; H.K. Yasuda ; Duck-Joo Yang
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 February 1995
Volume: 8
Page Count: 7
Page(s): 10 - 16
ISSN (Paper): 0894-6507
ISSN (Online): 1558-2345
DOI: 10.1109/66.350753
Regular:

Contact electrification occurs when two dissimilar materials are brought into contact, Each surface is left positively or negatively charged depending on the relative difference between surface... View More

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