IEEE - Institute of Electrical and Electronics Engineers, Inc. - Modeling dynamic clustering of arsenic including non-negligible concentrations of arsenic-point defect pairs

Author(s): H. Bauer ; P. Pichler ; H. Ryssel
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 1995
Volume: 8
Page Count: 5
Page(s): 414 - 418
ISSN (Paper): 0894-6507
ISSN (Online): 1558-2345
DOI: 10.1109/66.475183
Regular:

The time dependent deactivation of RTA-activated arsenic-doped samples was studied for chemical concentrations from 2/spl middot/10/sup 20/ cm/sup -3/ to 1/spl middot/10/sup 21/ cm/sup -3/ in the... View More

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