IEEE - Institute of Electrical and Electronics Engineers, Inc. - Reliability of MEMS capacitive switches

2013 IEEE International Wireless Symposium (IWS)

Author(s): J. C. M. Hwang ; C. L. Goldsmith
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2013
Conference Location: Beijing, China
Conference Date: 14 April 2013
Page(s): 1 - 4
ISBN (Electronic): 978-1-4673-2141-9
DOI: 10.1109/IEEE-IWS.2013.6616841
Regular:

This paper reviews the progress over the past decade in improving the reliability of MEMS capacitive switches. The emphasis is on mitigating the dielectric-charging problem as it currently limits... View More

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