IEEE - Institute of Electrical and Electronics Engineers, Inc. - A method to etch undoped silicon cantilever beams

Author(s): W. Choi ; J.G. Smits
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 1993
Volume: 2
Page Count: 5
Page(s): 82 - 86
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/84.232604
Regular:

A simple method has been designed to etch cantilever beams oriented in the <100> direction on

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