IEEE - Institute of Electrical and Electronics Engineers, Inc. - Temperature influence mechanism of micromechanical silicon oscillating accelerometer

2011 IEEE Power Engineering and Automation Conference (PEAM)

Author(s): Dong Jin-hu ; Qiu An-ping ; Shi Ran
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2011
Conference Location: Wuhan, China, China
Conference Date: 8 September 2011
Volume: 3
Page(s): 385 - 389
ISBN (CD): 978-1-4244-9689-1
ISBN (Electronic): 978-1-4244-9690-7
ISBN (Paper): 978-1-4244-9691-4
DOI: 10.1109/PEAM.2011.6135118
Regular:

Bias value and scale factor (SF) are two main performance indexes of silicon oscillating accelerometer(SOA). A deep research on that how temperature influence the performance of SOA by changing... View More

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