IEEE - Institute of Electrical and Electronics Engineers, Inc. - Radiation-induced charge effects in buried oxides with different processing treatments

Author(s): C.A. Pennise ; H.E. Boesch, Jr. ; G. Goetz ; J.B. McKitterick
Sponsor(s): IEEE Nuclear and Plasma Sciences Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 1993
Volume: 40
Page Count: 9
Page(s): 1,765 - 1,773
ISSN (Paper): 0018-9499
ISSN (Online): 1558-1578
DOI: 10.1109/23.273481
Regular:

The authors characterize the radiation-induced charge trapping and transport properties of the buried-oxide (BOX) layer using the photocurrent response technique and capacitance-voltage shift... View More

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