IEEE - Institute of Electrical and Electronics Engineers, Inc. - Adaptive control for piezo-actuated XY-table

2011 IEEE International Conference on Mechatronics and Automation (ICMA)

Author(s): Xinkai Chen ; Hattori, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2011
Conference Location: Beijing, China, China
Conference Date: 7 August 2011
Page(s): 2,089 - 2,094
ISBN (CD): 978-1-4244-8114-9
ISBN (Electronic): 978-1-4244-8115-6
ISBN (Paper): 978-1-4244-8113-2
ISSN (CD): 2152-7431
ISSN (Paper): 2152-7431
DOI: 10.1109/ICMA.2011.5986303
Regular:

The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high... View More

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