IEEE - Institute of Electrical and Electronics Engineers, Inc. - Hysteresis modeling and inverse feedforward control of an AFM piezoelectric scanner based on nano images

2011 IEEE International Conference on Mechatronics and Automation (ICMA)

Author(s): Hui Tang ; Yangmin Li ; Xinhua Zhao
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2011
Conference Location: Beijing, China, China
Conference Date: 7 August 2011
Page(s): 189 - 194
ISBN (CD): 978-1-4244-8114-9
ISBN (Electronic): 978-1-4244-8115-6
ISBN (Paper): 978-1-4244-8113-2
ISSN (CD): 2152-7431
ISSN (Paper): 2152-7431
DOI: 10.1109/ICMA.2011.5985654
Regular:

Atomic force microscope(AFM) is a very important instrument with atomistic level resolution, which has been widely employed in the field of micro/nano technology. As a critical part of AFM system,... View More

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