IEEE - Institute of Electrical and Electronics Engineers, Inc. - A new thermal switch design through CMOS MEMS fabrication process

2011 IEEE 4th International Nanoelectronics Conference (INEC)

Author(s): Lei-Chun Chou ; You-Liang Lai ; Chun-Cheng Hou ; Hui-Min Wang ; Sheng-Chieh Huang ; Jin-Chern Chiou ; Chun-Yin Tsai
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2011
Conference Location: Tao-Yuan, Taiwan, Taiwan
Conference Date: 21 June 2011
Page(s): 1 - 2
ISBN (Electronic): 978-1-4577-0378-2
ISBN (Paper): 978-1-4577-0379-9
ISBN (Online): 978-1-4577-0377-5
ISSN (Electronic): 2159-3531
ISSN (Paper): 2159-3523
ISSN (Online): 2159-3523
DOI: 10.1109/INEC.2011.5991715
Regular:

The present study focuses on implementing a novel CMOS-MEMS thermal switch by using commercially available TSMC 0.35 μm two-poly four-metal (2P4M) CMOS process. There are two novel designs in... View More

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