IEEE - Institute of Electrical and Electronics Engineers, Inc. - Characterization of InN films grown by plasma-assisted MOMBE

2011 IEEE 4th International Nanoelectronics Conference (INEC)

Author(s): Shou-Yi Kuo ; Fang-I Lai ; Woei-Tyng Lin ; Wei-Chun Chen ; Jui-Pin Chen ; Chien-Nan Hsiao
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2011
Conference Location: Tao-Yuan, Taiwan, Taiwan
Conference Date: 21 June 2011
Page(s): 1 - 2
ISBN (Electronic): 978-1-4577-0378-2
ISBN (Paper): 978-1-4577-0379-9
ISBN (Online): 978-1-4577-0377-5
ISSN (Electronic): 2159-3531
ISSN (Paper): 2159-3523
ISSN (Online): 2159-3523
DOI: 10.1109/INEC.2011.5991698
Regular:

In this paper, we report the growth of InN films on sapphire substrate by RF- MOMBE. GaN buffer layer was used to lower the lattice mismatch between InN and sapphire. XRD patterns indicated that... View More

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