IEEE - Institute of Electrical and Electronics Engineers, Inc. - Metal-semiconductor-metal electron detector with nano-hole array structure to improve the electricity characteristic and enhance the performance

2011 IEEE 4th International Nanoelectronics Conference (INEC)

Author(s): Ming-Lun Lee ; Kung-Chu Ho ; Chieh-Wei Lee ; Chieh-Hsiung Kuan
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2011
Conference Location: Tao-Yuan, Taiwan, Taiwan
Conference Date: 21 June 2011
Page(s): 1 - 2
ISBN (Electronic): 978-1-4577-0378-2
ISBN (Paper): 978-1-4577-0379-9
ISBN (Online): 978-1-4577-0377-5
ISSN (Electronic): 2159-3531
ISSN (Paper): 2159-3523
ISSN (Online): 2159-3523
DOI: 10.1109/INEC.2011.5991690
Regular:

In this work, we first fabricated the conventional metal-semiconductor-metal (MSM) interdigitated electron detector with aluminum contact as the control group, then used e-beam lithography... View More

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