IEEE - Institute of Electrical and Electronics Engineers, Inc. - Chloride ion selective electrode for detection of low chloride ion concentration

2011 IEEE 4th International Nanoelectronics Conference (INEC)

Author(s): Jung-Chuan Chou ; Meng-Wei Su ; Chun-Hung Liu ; Chien-Cheng Chen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2011
Conference Location: Tao-Yuan, Taiwan, Taiwan
Conference Date: 21 June 2011
Page(s): 1 - 2
ISBN (Electronic): 978-1-4577-0378-2
ISBN (Paper): 978-1-4577-0379-9
ISBN (Online): 978-1-4577-0377-5
ISSN (Electronic): 2159-3531
ISSN (Paper): 2159-3523
ISSN (Online): 2159-3523
DOI: 10.1109/INEC.2011.5991671
Regular:

In this study, the ruthenium dioxide (RuO2) thin film was deposited on silicon (Si) substrate by radio frequency (R. F.) sputtering system. In order to optimize the sensing property of the... View More

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