IEEE - Institute of Electrical and Electronics Engineers, Inc. - Electrical monitoring of gate and active area mask misalignment error

2011 Symposium on VLSI Circuits

Author(s): Bansal, A. ; Singhee, A. ; Acar, E. ; Costrini, G.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2011
Conference Location: Kyoto, Japan, Japan
Conference Date: 15 June 2011
Page(s): 220 - 221
ISBN (CD): 978-4-86348-166-4
ISBN (Paper): 978-1-61284-175-5
ISSN (CD): 2158-5601
ISSN (Electronic): 2158-5636
ISSN (Paper): 2158-5601
Regular:

A model-free, gate-diffusion (PC-RX) misalignment monitor circuit is implemented in 32nm CMOS for fabrication tool and layout ground rule characterization. It requires only DC current measurements... View More

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