IEEE - Institute of Electrical and Electronics Engineers, Inc. - Analysis of certain methods for determining contact resistivity

2011 12th International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM 2011)

Author(s): Smirnov, I.A. ; Kalinin, S.V.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2011
Conference Location: Erlagol, Altai, Russia, Russia
Conference Date: 30 June 2011
Page(s): 162 - 164
ISBN (CD): 978-1-61284-794-8
ISBN (Electronic): 978-1-61284-795-5
ISBN (Paper): 978-1-61284-793-1
DOI: 10.1109/EDM.2011.6006923
Regular:

Different options for determining contact resistivity using TLM method are analyzed in the paper. The analysis is carried out on the example of two simplified test structures. The first structure... View More

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