IEEE - Institute of Electrical and Electronics Engineers, Inc. - Electrical microchannel silicon sensor for solvent detection

2011 12th International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM 2011)

Author(s): Parashchenko, M.A. ; Vandisheva, N.V. ; Kirienko, V.V. ; Filippov, N.S. ; Romanov, S.I.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2011
Conference Location: Erlagol, Altai, Russia, Russia
Conference Date: 30 June 2011
Page(s): 150 - 151
ISBN (CD): 978-1-61284-794-8
ISBN (Electronic): 978-1-61284-795-5
ISBN (Paper): 978-1-61284-793-1
DOI: 10.1109/EDM.2011.6006919
Regular:

This paper has been devoted to creation of the sensor based on ordered microchannel silicon resistor for electrophysical detection of liquids. Interactions of sensor with organic and inorganic... View More

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