IEEE - Institute of Electrical and Electronics Engineers, Inc. - Optimization of surface treatment of SOI-nanowire sensors

2011 12th International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM 2011)

Author(s): Malyarenko, N.F. ; Naumova, O.V. ; Zhanaev, E.D. ; Popov, V.P.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2011
Conference Location: Erlagol, Altai, Russia, Russia
Conference Date: 30 June 2011
Page(s): 116 - 118
ISBN (CD): 978-1-61284-794-8
ISBN (Electronic): 978-1-61284-795-5
ISBN (Paper): 978-1-61284-793-1
DOI: 10.1109/EDM.2011.6006910
Regular:

Several types of chemical treatment aimed at removing surface contamination and stabilizing charge state of SOI-NW sensors were tested. The effective charge on the surface allowing to select the... View More

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