IEEE - Institute of Electrical and Electronics Engineers, Inc. - Thickness measurement of a thin-film layer on an anisotropic substrate by phase-sensitive acoustic microscope

Author(s): Y. Sasaki ; T. Endo ; T. Yamagishi ; M. Sakai
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 1992
Volume: 39
Page Count: 5
Page(s): 638 - 642
ISSN (Paper): 0885-3010
DOI: 10.1109/58.156182
Regular:

Complex V(z) curves for single thin-film layers on anisotropic substrates are studied both experimentally and theoretically, and the application of V(z) measurement to the determination of film... View More

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