IEEE - Institute of Electrical and Electronics Engineers, Inc. - Spectral responses of GaAs photodiodes fabricated by rapid thermal diffusion

Author(s): A. Usami ; A. Kitagawa ; T. Wada ; M. Suzuki ; Y. Tokuda ; H. Kan
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1992
Volume: 13
Page Count: 2
Page(s): 59 - 60
ISSN (Paper): 0741-3106
ISSN (Online): 1558-0563
DOI: 10.1109/55.144951
Regular:

The spectral responses of GaAs photodiodes fabricated by rapid thermal diffusion (RTD) of Zn are presented. The authors tried controlling the p/sup +/-n junction depth by the heating rate of RTD,... View More

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