IEEE - Institute of Electrical and Electronics Engineers, Inc. - Silicon microstructures: Fabrication and application

2011 34th International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO)

Author(s): Amon, S. ; Vrtacnik, D. ; Resnik, D. ; Mozek, M. ; Aljancic, U. ; Pecar, B.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2011
Conference Location: Opatija, Croatia, Croatia
Conference Date: 23 May 2011
Page(s): 7 - 16
ISBN (CD): 978-953-233-067-0
ISBN (Electronic): 978-953-233-059-5
ISBN (Paper): 978-1-4577-0996-8
Regular:

An overview of micromachining technologies for the fabrication of silicon microstructures will be given. Basic micromachining technologies such as various etching methods of silicon (isotropic,... View More

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