IEEE - Institute of Electrical and Electronics Engineers, Inc. - Measurement of wear in polysilicon micromotors

Author(s): M. Mehregany ; S.D. Senturia ; J.H. Lang
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 1992
Volume: 39
Page Count: 8
Page(s): 1,136 - 1,143
ISSN (Paper): 0018-9383
ISSN (Online): 1557-9646
DOI: 10.1109/16.129094
Regular:

Two polysilicon variable-capacitance rotary side-drive micromotor types, including harmonic and salient-pole, are described. Voltages as low as 26 and 35 V across 1.5- mu m gaps are... View More

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