IEEE - Institute of Electrical and Electronics Engineers, Inc. - Wavelength-specific pyrometry as a temperature measurement tool

Author(s): M. Delfino ; D.T. Hodul
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1992
Volume: 39
Page Count: 7
Page(s): 89 - 95
ISSN (Paper): 0018-9383
ISSN (Online): 1557-9646
DOI: 10.1109/16.108216
Regular:

A wavelength-specific 9.4+or-0.3- mu m pyrometer with a 0.41 constant emissivity was used to measure the temperature of 2 to 6 Omega -cm, n-type silicon coated with 1.3 mu m of thermal oxide from... View More

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