IEEE - Institute of Electrical and Electronics Engineers, Inc. - A 8-resistor SU-8 accelerometer with reduced cross axis sensitivity

APCCAS 2010-2010 IEEE Asia Pacific Conference on Circuits and Systems

Author(s): Ray, P. ; Rao, V.R. ; Apte, P.R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2010
Conference Location: Kuala Lumpur, Malaysia, Malaysia
Conference Date: 6 December 2010
Page(s): 824 - 826
ISBN (CD): 978-1-4244-7455-4
ISBN (Electronic): 978-1-4244-7456-1
ISBN (Paper): 978-1-4244-7454-7
DOI: 10.1109/APCCAS.2010.5775073
Regular:

The MEMS accelerometer has a high cross sensitivity due to proof mass being eccentric. This paper gives results for a SU-8 z-axis accelerometer that uses 8-resistor Wheatstone-bridge to reduce the... View More

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