IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design, simulation, modeling and characterization of micromachined microcantilever using coventorware software

APCCAS 2010-2010 IEEE Asia Pacific Conference on Circuits and Systems

Author(s): Ahmed, A.Y. ; Dennis, J.O. ; Mohamad Saad, M.N.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2010
Conference Location: Kuala Lumpur, Malaysia, Malaysia
Conference Date: 6 December 2010
Page(s): 820 - 823
ISBN (CD): 978-1-4244-7455-4
ISBN (Electronic): 978-1-4244-7456-1
ISBN (Paper): 978-1-4244-7454-7
DOI: 10.1109/APCCAS.2010.5774753
Regular:

Modeling and simulation of a microcantilever designed to achieve high resonant frequency on the sensing area is presented in this paper. Simple analytical models of the microcantilever are... View More

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