IEEE - Institute of Electrical and Electronics Engineers, Inc. - Microwave based plasma technology

2010 20th International Conference on Applied Electromagnetics and Communications (ICECom)

Author(s): Kaiser, M. ; Baumgärtner, K.-M. ; Mattheus, A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2010
Conference Location: Dubrovnik, Croatia, Croatia
Conference Date: 20 September 2010
Page(s): 1 - 3
ISBN (Electronic): 978-9-5360-3758-2
ISBN (Paper): 978-1-61284-998-0
Regular:

Thin film deposition based on plasma CVD processes are well known for many years. While these processes mainly drove the miniaturization of wafer based micro electronics, the upscale was for a... View More

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