IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Resonant Magnetometer Based on MEMS

2010 International Conference on Electrical and Control Engineering (ICECE)

Author(s): Muzhi Hu ; Zheng You
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2010
Conference Location: Wuhan, China, China
Conference Date: 25 June 2010
Page(s): 4,944 - 4,947
ISBN (CD): 978-0-7695-4031-3
ISBN (Electronic): 978-1-4244-6881-2
ISBN (Paper): 978-1-4244-6880-5
DOI: 10.1109/iCECE.2010.1196
Regular:

In this paper, a MEMS surface resonant magnetometer based on Lorentz force is presented. This magnetometer has three current carriers to sense the magnetic field and changes into deflection of... View More

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