IEEE - Institute of Electrical and Electronics Engineers, Inc. - Chemically Sensitive Field-Effect Sensors for Polar Molecular Detection

2010 International Conference on Electrical and Control Engineering (ICECE)

Author(s): Shoucai Yuan ; Xiaolin Fan ; Xun Li ; Ziyu Wang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2010
Conference Location: Wuhan, China, China
Conference Date: 25 June 2010
Page(s): 578 - 582
ISBN (CD): 978-0-7695-4031-3
ISBN (Electronic): 978-1-4244-6881-2
ISBN (Paper): 978-1-4244-6880-5
DOI: 10.1109/iCECE.2010.148
Regular:

The chemically sensitive field-effect sensors were made with simplified silicon chip technology, and its fabrication processing flow was designed based on the metal gate CMOS technology employing... View More

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