IEEE - Institute of Electrical and Electronics Engineers, Inc. - A CMOS-MEMS Thermoelectric Infrared Sensor

2010 International Conference on Electrical and Control Engineering (ICECE 2010)

Author(s): Hung-Yu Wang ; Po-Yang Tsai ; Chih-Yi Liu ; Jyun-Jie Huang
Sponsor(s): IEEE
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2010
Conference Location: Wuhan, China
Conference Date: 25 June 2010
Page(s): 19 - 22
ISBN (CD): 978-0-7695-4031-3
ISBN (Electronic): 978-1-4244-6881-2
ISBN (Paper): 978-1-4244-6880-5
DOI: 10.1109/iCECE.2010.13
Regular:

This paper presents a thermoelectric infrared (IR) sensor which comprise of an infrared detector and a readout circuitry. It is designed by TSMC 0.35 μm CMOS process with subsequent... View More

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