IEEE - Institute of Electrical and Electronics Engineers, Inc. - The Investigation on Au Nano-particles on Si Wafer after Annealing at Different Temperatures

2010 International Conference on Electrical and Control Engineering (ICECE)

Author(s): Dongbo Zhang ; Lei Yang ; Jae-Wung Lee ; Ze Liu ; Meilin Liu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2010
Conference Location: Wuhan, China, China
Conference Date: 25 June 2010
Page(s): 4,825 - 4,828
ISBN (CD): 978-0-7695-4031-3
ISBN (Electronic): 978-1-4244-6881-2
ISBN (Paper): 978-1-4244-6880-5
DOI: 10.1109/iCECE.2010.1167
Regular:

In this study, in order to investigate the morphology change of Au nano-particles/island film with the sputtering time and annealing time, Au nano-particles/island films were... View More

Advertisement