IEEE - Institute of Electrical and Electronics Engineers, Inc. - MIMO Identification of 3 DOF Planar Micro Positioning Stage

2010 International Conference on Electrical and Control Engineering (ICECE)

Author(s): Yang Jin ; Yin Wensheng ; Duan Guanghong
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2010
Conference Location: Wuhan, China, China
Conference Date: 25 June 2010
Page(s): 1,272 - 1,275
ISBN (CD): 978-0-7695-4031-3
ISBN (Electronic): 978-1-4244-6881-2
ISBN (Paper): 978-1-4244-6880-5
DOI: 10.1109/iCECE.2010.316
Regular:

MIMO closed loop identification is performed for a planar positioning stage. Spectral analysis approach is used to cope with the difficulty imposed by the low SNR of data of the coupling models,... View More

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