IEEE - Institute of Electrical and Electronics Engineers, Inc. - Precise position control of coarse/fine dual stage using pneumatic actuators

2010 World Automation Congress (WAC)

Author(s): Tadano, K. ; Arai, T. ; Kawashima, K. ; Fujita, T. ; Kagawa, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2010
Conference Location: Kobe, Japan, Japan
Conference Date: 19 September 2010
Page(s): 1 - 6
ISBN (Electronic): 978-1-889335-42-1
ISBN (Paper): 978-1-4244-9673-0
ISSN (CD): 2154-4824
ISSN (Paper): 2154-4824
Regular:

In this paper, a coarse/fine dual positioning stage for single degree of freedom using pneumatic actuators is developed. The coarse movement utilizes a pneumatic cylinder with air bearings. The... View More

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