IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of atmospheric pressure sensors using AU-AU bonding techniques for human activity monitoring

2010 World Automation Congress (WAC)

Author(s): Xiuchun Hao ; Yonggang Jiang ; Shohei Shiono ; Fujita, T. ; Higuchi, K. ; Maenaka, K.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2010
Conference Location: Kobe, Japan, Japan
Conference Date: 19 September 2010
Page(s): 1 - 5
ISBN (Electronic): 978-1-889335-42-1
ISBN (Paper): 978-1-4244-9673-0
ISSN (CD): 2154-4824
ISSN (Paper): 2154-4824
Regular:

This paper reports a capacitive pressure sensor for human activity monitoring application, which is fabricated by Au-Au diffusion bonding in ambient pressure. The optimized condition for the Au-Au... View More

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