IEEE - Institute of Electrical and Electronics Engineers, Inc. - White-light transmission reflection interference technology application in three-dimensional reconstruction method validation for microstructures

2010 3rd International Congress on Image and Signal Processing (CISP)

Author(s): Chenyang Xue ; Jun Liu ; Xiujian Chou ; Yi Liu ; Kangkang Niu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2010
Conference Location: Yantai, China, China
Conference Date: 16 October 2010
Volume: 2
Page(s): 867 - 870
ISBN (CD): 978-1-4244-6515-6
ISBN (Electronic): 978-1-4244-6516-3
ISBN (Paper): 978-1-4244-6513-2
DOI: 10.1109/CISP.2010.5646874
Regular:

In this paper the reconstructed method of three-dimensional morphology validated by the method of transmission reflection interference for GaAs steps structure, which is deposited by transparent... View More

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